Thermofisher DualBeam FIB-SEM Scios2

Focused ion beam – SEM (FIB-SEM) wird verwendet, um nanometer-dicke TEM-Präparate aus verschiedensten Probenmaterialien herauszuschneiden. Dies erfolgt mit Hilfe eines fokussierten Galliumionenstrahls, welcher auch für die 3D-Analytik eingesetzt werden kann. Das Gerät ist mit einer Vielzahl unterschiedlicher Detektoren ausgestattet, unter anderem auch mit einem Kathodolumineszenz-Detektor.

ThermoFisher Scios2 FIB-SEM

FIB-SEM ThermoFisher Scios2

  • Hersteller: ThermoFisher
  • Modell: Scios2 HiVac

Elektronensäule

  • NlCol electron column
  • Thermic Schottky field emitter
  • Acceleration voltage: 0.2 – 30 kV, 20 eV landing energy possible with optional beam deceleration
  • Beam current: 1 pA – 400 nA
  • Resolution: 0.7 nm at 30kV (STEM), 1.0 nm at 30kV (Trinity), 1.4 nm at 1 kV (Trinity)

Ionensäule

  • Gallium ion emitter (field emission focused ion beam optics)
  • Acceleration voltage: 0.5 – 30 kV
  • Beam current: 1.5 pA – 65 nA in 15 steps
  • Resolution: 3.0 nm
  • Platinum deposition
  • Carbon deposition

Detektoren

  • EBSD Symmetry2 detector, Oxford Instruments, high speed, low noise CMOS detector
  • EDX Ultimax silicon drift detector (170 mm2), Oxford Instruments, 125 eV energy resolution
  • Retractable directional back-scattered (DBS) detector (ultra-sensitive solid-state detector)
  • Retractable STEM3+ detector for scanning transmission imaging on thin samples
  • Cathodoluminescence detector (RGB)
  • Solid-state Detector Integration Kit (Trinity)
  • Advanced Signal Detection

Vakuumsystem

  • Turbomolecular drag pump with 240 l/s
  • Scroll pump
  • Ion getter pumps – two for the electron column with integrated battery backup, one for the ion column
  • Auto bake-out and Auto-start for easy maintenance of the field emission gun
  • Field emission gun safety mechanism

Weitere Ausstattungsmerkmale

  • Easy Lift EX NanoManipulator
  • Row holder for TEM Grids
  • Load Base
  • CCD IR camera
  • In-chamber Nav-Cam
  • AutoTEM4 Software
  • AutoSlice and View 4 (+ Analytical Package)
  • Maps 3 for SEM with Correlative Workflow
  • Aztec Crystal 5.0 software package
  • Avizo for EM Systems
  • Plasma Cleaner
  • Uninterruptible Power Supply 230 V

Peripherie

  • Support PC
  • Control PC online
  • Analysis PC offline
  • Chiller – cooling capacity 600 Watt at 20°C water supply temperature, pump capacity: 4 l/min at 2.2 bar