Applications and Services
Analysis | Research and Development | Applications | Consulting |
Analysis
- On-site analysis of plasma process problems, i. e. by optical methods.
- RF measurements and analysis of process instabilities, EMC analysis and evaluation of newly developped devices
- Plasma and process diagnostics by
- Invasive methods: By probes, as depicted on the right-hand side, relevant process parameters like electron density and temperature, potentials, EVDF and others can be investigated spacially resolved. Time series measurements are also possible.
- Non-invasive methods usually span optical emission and absorption spectroscopy (also time-resolved). They can deliver additional information on the neutral gas temperature. - There are numerous surface diagnostics available, some of them are XRD, XPS, AFM, SEM, EDX, surface energy analysis, FTIR, microscopy, profilometer, ...
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Research and Development
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Development of thin coatings with functionalized film properties such as e. g.
- optically active coatings designed for dedicated spectral wavelengths
- optical absorber coatings
- hard ceramic coatings for enhancing wear resistance of strongly utilized components
- gas diffusion barrier coatings for plastic-like materials
- thermal barrier coatings
- ... -
Planning and development of new specialized plasma sources for multiple application areas (coating, etching, cleaning ...) within the surface modifying industry
- atmospheric plasmas (jets, arrays, DBDs), ICP, CCP, VHF, micro wave -
Process development on your existing machines (PVD, PECVD, ...), process diagnostics and process control using a large pool of plasma diagnostics
- surface cleaning processess
- adhesion promoting layers for special thin film systems
- bio compatible coatings
- ... - Modelling and simulation of technically relevant plasmas with the aim of understanding process behaviour for developing process adjustments.
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Applications
The application of technically relevant plasmas are manifold. The following list represents a small excerpt from our research portfolio:
- Food industry: PECVD thin film process to deposit diffusion barriers on recycling capable packaging materials like PET in order to increase the shelf-live od beverages
- Automotive and lighting industry: Development of HID lamps, e. g. for use in cars or optimization of the single lamp manufacturing process steps
- Consumer products: Atmospheric pressure plasmas for the pre-treatment of surfaces (e. g. adhesion promotion of paint on difficult surfaces, stimulation and acceleration of wound healing)
- Medical industry: Gentle and residue-free treatment of medical goods, e. g. sterilisation of thermolabile materials or deposition of biocompatible coatings
- Optical technologies: Anti-reflection coatings, mirrors or absorber coatings
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General purpose:
- Wear-resistant coatings like diamond-like-carbon (DLC) or hard ceramic films
- Metallic (also ferromagnetic) thin films as electrically conducting layers
![](/mam/acc/images/plasma/mfccpbig200px.png)
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Consulting
If you have further questions to the above topics or even a precise problem, we can advise you by the following means:
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Technology and application consulting:
- What is technologically possible and feasible?
- Which kind of plasma process fits to what specific application problem?
- Are there new alternatives to existing processes?
- How can existing process tools be refittet to new process recipes for new surface treatments?
- What are the requirements / specifications for a specific problem? - Planning and design support for new plasma chambers and processes
- Individual training courses and presentations on up-to-date plasma technology topics on-site or centrally located on-campus
- Workshops on specialized topics as advanced training for nearly finished students and process tool operators
- Consulting and support with plasma process control issues
- Feasibility studies
- Extensive experience with the application, execution and settlement of public funded projects